적합직교분해법을 이용한 AFM 마이크로캔틸레버의 진동해석
Vibration Analysis of the Tapping AFM Microcantilevers Using Proper Orthogonal Decomposition
홍상혁(서울대학교 대학원 기계항공공학부); 이수일(서울시립대학교)
20권 4호, 414~421쪽
초록
The proper orthogonal decomposition(POD) is used to the vibration analysis of microcantilever in tapping mode atomic force microscopy(AFM). The proper orthogonal modes (POM) are extracted from vibrating signals of microcantilever when it resonates and taps the sample. We present recent ideas based on POD and detailed experiments that yield new perspectives into the microscale structures such as the tapping cantilever. The linearized modeling technique based on POD is very useful to show the principal characteristics of the complex dynamic responses of the AFM microcantilever.
Abstract
The proper orthogonal decomposition(POD) is used to the vibration analysis of microcantilever in tapping mode atomic force microscopy(AFM). The proper orthogonal modes (POM) are extracted from vibrating signals of microcantilever when it resonates and taps the sample. We present recent ideas based on POD and detailed experiments that yield new perspectives into the microscale structures such as the tapping cantilever. The linearized modeling technique based on POD is very useful to show the principal characteristics of the complex dynamic responses of the AFM microcantilever.
- 발행기관:
- 한국소음진동공학회
- 분류:
- 기계공학