Fabrication of 1 μm Thickness Lead Zirconium Titanate Films Using Poly(N-vinylpyrrolidone) Added Sol-gel Method
Fabrication of 1 μm Thickness Lead Zirconium Titanate Films Using Poly(N-vinylpyrrolidone) Added Sol-gel Method
Seung Min Oh(Korea University); 강민규(Korea Institute of Science and Technology); Young Ho Do(Korea Institute of Science and Technology); 강종윤(한국과학기술연구원); Seok-JinYoon(Korea Institute of Science and Technology); Sahn Nahm(Korea University)
12권 5호, 222~225쪽
초록
Lead zirconate titanate (PZT) films were fabricated on Pt/Ti/SiO2/Si substrate by the sol-gel method using a sol containing poly(N-vinylpyrrolidone) (PVP). PVP in alkoxide solutions can suppress the condensation reaction in gel films during heat treatment, and increase the viscosity of alkoxide solutions. Single-phase PZT films as thick as 1 μm were deposited by repetitive coating with successive third-step heat treatments at 150℃, 350℃ and 650℃. After heat treatment, the films were crack free, and optically transparent. As a result, we demonstrated a PZT film with a PVP molar ratio of 0.5, which has a permittivity of 734, a dielectric loss of 0.042, a Pr of 40.5 μC/cm2 and an Ec of 156 kV/cm.
Abstract
Lead zirconate titanate (PZT) films were fabricated on Pt/Ti/SiO2/Si substrate by the sol-gel method using a sol containing poly(N-vinylpyrrolidone) (PVP). PVP in alkoxide solutions can suppress the condensation reaction in gel films during heat treatment, and increase the viscosity of alkoxide solutions. Single-phase PZT films as thick as 1 μm were deposited by repetitive coating with successive third-step heat treatments at 150℃, 350℃ and 650℃. After heat treatment, the films were crack free, and optically transparent. As a result, we demonstrated a PZT film with a PVP molar ratio of 0.5, which has a permittivity of 734, a dielectric loss of 0.042, a Pr of 40.5 μC/cm2 and an Ec of 156 kV/cm.
- 발행기관:
- 한국전기전자재료학회
- 분류:
- 전기공학