실험계획법을 이용한 입구덕트 스프레이의 습식 세정 효율 변화효과 분석 연구

The purpose of this study is to develop a packing-free wet scrubber to prolong the maintenance interval compared with the conventional packed bed wet scrubbers with which frequent operation stops are unavoidable to clean the packing materials. The main- and interaction-effects were quantitatively analyzed by regression analysis for the measured ammonia scrubbing data from the experiments prepared by experimental design. The scrubbing efficiency of the newly developed wet scrubber was found to be over 95% under the condition of flue gas flow rate of 90CMM and liquid-to-gas ratio 2 l/m3 for all considered trials of experimental design. The interaction effect between the inlet duct spray and the filter was found to be important, which controls the droplet growth due to the droplet collisions between the duct- and scrubbing tower-spray. The presented methodology to analyze the impacts of operational and design factors on the scrubber efficiency showed potential for applications to optimize the future flue gas abatement process in semiconductor plants.