반도체 공정용 진공펌프의 보증 데이터 분석을 위한 신뢰성 대시보드 개발

Purpose: This paper presents a reliability dashboard incorporating big data visualization technology to realize the warranty data analysis of vacuum pumps for semiconductor processes. Methods: A reliability dashboard was developed in accordance with 1) KPI definition, 2) business process and data understanding, 3) data extraction, loading and transformation, 4) reliability analysis, and 5) dashboard implementation. MS Excel, MS Access, Weibull++, and MS Power BI were used for the data collection, data integration and analysis, statistical analysis of reliability data, and calculation processing and data visualization for the status analysis, respectively. Result: The developed reliability dashboard was used to indentify the failure status and reliability analysis aspects of vacuum pumps for semiconductor processes. Conclusion: The reliability dashboard can help monitor the quality level experienced by customers and provide the basis for the root cause analyses for failures occurring in the field.